The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Aug. 24, 2006
Ritsuo Fukaya, Hitachinaka, JP;
Hidetoshi Sato, Hitachinaka, JP;
Zhigang Wang, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Makoto Ezumi, Mito, JP;
Ritsuo Fukaya, Hitachinaka, JP;
Hidetoshi Sato, Hitachinaka, JP;
Zhigang Wang, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Makoto Ezumi, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A scanning electron microscope is disclosed. The primary electron beam is radiated on a reticle (specimen), and an observation image of the reticle is obtained using the electrons secondarily released. The microscope comprises a lamp for radiating the vacuum ultraviolet light having the wavelength of not more than 172 nm on the reticle in the atmosphere, a radiation chamber for hermetically sealing the reticle so that the vacuum ultraviolet light can be radiated on the reticle, and a specimen holder for holding the reticle in the radiation chamber and capable of adjusting the distance between the lamp and the reticle.