Hidetoshi Sato

Title: Hidetoshi Sato: Innovator in Charged Particle Beam Technology

Introduction

Hidetoshi Sato is a prominent inventor based in Hitachinaka, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 8 patents. His work focuses on enhancing the accuracy and efficiency of charged particle beam devices, which are crucial in various scientific and industrial applications.

Latest Patents

One of Hidetoshi Sato's latest patents is a charged particle beam device. This innovative device is characterized by its ability to control a deflector to correct the amount of scanning deflection of a charged particle beam. It operates under two detection conditions: one for detecting a secondary charged particle signal and another for detecting a reflected charged particle signal. This technology allows for the correction of length measurement errors and scaling fluctuations that may occur when changing the type of charged particle being detected. Consequently, it enables accurate imaging and measurement of low-step or charged samples, regardless of potential errors.

Another notable patent is a sample conveying mechanism designed to minimize the risk of damage to sensitive samples, particularly photomasks. This mechanism features a sample retention system that holds the sample in a suspended position. It is specifically designed to keep the pattern surface of the sample separated from the projection section of a flange, thereby preventing contact with the components of the conveying mechanism.

Career Highlights

Hidetoshi Sato has built a successful career at Hitachi High-Technologies Corporation, where he has been instrumental in advancing technologies related to charged particle beams. His innovative approaches have led to significant improvements in the precision and reliability of these devices.

Collaborations

Throughout his career, Hidetoshi has collaborated with notable colleagues, including Katsuya Kawakami and Takashi Gunji. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Hidetoshi Sato's contributions to charged particle beam technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of the challenges in the field and a commitment to developing solutions that enhance measurement accuracy and sample integrity. His work continues to influence advancements in various scientific and industrial applications.