The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
May. 26, 2010
Takashi Gunji, Mito, JP;
Hidetoshi Sato, Hitachinaka, JP;
Katsuya Kawakami, Mito, JP;
Hideki Yatabe, Kasama, JP;
Takashi Gunji, Mito, JP;
Hidetoshi Sato, Hitachinaka, JP;
Katsuya Kawakami, Mito, JP;
Hideki Yatabe, Kasama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.