Company Filing History:
Years Active: 2013-2019
Title: Innovations of Richard M. White: Pioneering Advances in Plasma Processing
Introduction
Richard M. White, an accomplished inventor based in Newmarket, NH, has made significant contributions to the field of semiconductor technology. With a robust portfolio of 11 patents to his name, White is recognized for his innovative solutions that enhance plasma processing efficiency and reliability.
Latest Patents
Among his latest inventions, Richard has developed a "Biasing System for a Plasma Processing Apparatus." This apparatus features a process chamber housing that includes a platen designed to support a workpiece. The unique biasing system enables the platen to attract ions from the plasma during a processing interval and repels ions during a subsequent cleaning interval, ensuring optimal operation for semiconductor manufacturing.
Another cutting-edge innovation from White is the "Temperature Controlled Ion Source." This invention addresses the critical need for improved thermal management in ion sources. By integrating the ion source into a heat sink with specially designed geometries, the invention ensures high-pressure thermal contact, allowing precise control over the temperature and flow of coolant, thus optimizing ion source performance.
Career Highlights
Richard M. White is currently employed at Varian Semiconductor Equipment Associates, Inc., a leading company in the field of semiconductor manufacturing equipment. His expertise and patents are pivotal in advancing the technology used in the semiconductor industry, demonstrating a career dedicated to innovation and excellence.
Collaborations
Throughout his career, Richard has worked alongside talented individuals such as Bon-Woong Koo and Kevin M. Daniels. Their collaborative efforts have fostered an environment of creativity, resulting in groundbreaking technologies that continue to impact the semiconductor landscape.
Conclusion
Richard M. White's innovative patents and his commitment to advancing semiconductor technologies mark him as a key inventor in his field. His contributions not only enhance current technologies but also pave the way for future developments in plasma processing and ion sources, solidifying his legacy as a trailblazer in innovation.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.