Renzo Capelli is a distinguished inventor based in Heidenheim, Germany. He has made significant contributions to the fields of metrology and optical systems, holding a total of 12 patents. His innovative methods and systems have advanced the precision of measurements in various applications.

Latest Patents

Among his latest patents is a method for measuring the reflectivity of an object for measurement light. This method involves a reflectivity measurement apparatus that includes a measurement light source, an object holder, and a spatially resolving detector. The system captures measurement light reflected by the object, allowing for precise determination of reflectivity parameters, particularly for finely structured objects like lithography masks. Another notable patent focuses on determining the imaging quality of an optical system. This method utilizes a periodic test structure and various illumination angle distributions to assess the optical system's performance, yielding improved imaging quality determination.

Career Highlights

Renzo Capelli is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and metrology. His work has been pivotal in enhancing measurement techniques and optical system evaluations. His expertise in these areas has positioned him as a key figure in the industry.

Collaborations

Throughout his career, Renzo has collaborated with notable colleagues, including Markus Koch and Dirk Hellweg. These partnerships have fostered innovation and contributed to the development of advanced metrology systems.

Conclusion

Renzo Capelli's contributions to metrology and optical systems exemplify his commitment to innovation and precision. His patents and work at Carl Zeiss SMT GmbH continue to influence the field significantly.

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