Company Filing History:
Years Active: 2009-2018
Title: The Innovative Contributions of Ralf Scharnweber
Introduction
Ralf Scharnweber, an accomplished inventor based in Aalen, Germany, has made significant strides in the field of microlithography. With a portfolio comprising ten patents, his work focuses on refining optical systems and enhancing illumination technologies for projection exposure apparatuses.
Latest Patents
Among his latest patents, Scharnweber has developed an optical system for a microlithographic projection exposure apparatus. This invention features a mirror arrangement with multiple independently displaceable mirror elements that can alter the angular distribution of reflected light. Additionally, he has created a microlithographic exposure method that incorporates a manipulator positioned downstream of the mirror arrangement. This manipulator contains a raster arrangement of elements designed to influence the polarization state and intensity of incident light based on its incidence location.
Another notable patent pertains to illumination systems for microlithographic projection exposure apparatuses. This innovation includes scattering structures and an optical integrator designed to produce several secondary light sources, which enhances the overall functionality and efficiency of microlithographic systems.
Career Highlights
Ralf Scharnweber's professional journey has seen him contribute to prestigious companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG, where he has applied his expertise in optics and illumination systems. His work has played a critical role in advancing technology within these enterprises, particularly in the field of high-precision manufacturing.
Collaborations
Throughout his career, Scharnweber has collaborated with notable coworkers, including Johannes Wangler and Heiko Siekmann. These partnerships have fostered innovation and have been instrumental in the development of groundbreaking optical technologies that are essential to the industry.
Conclusion
Ralf Scharnweber’s contributions to microlithography and optical systems exemplify the impact of innovative thinking in technology. His ten patents underscore his commitment to advancing the field and facilitating the growth of sophisticated manufacturing processes. As technology continues to evolve, inventors like Scharnweber stand at the forefront, driving progress and inspiring future generations of engineers and inventors.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.