Rainer Hoch

Title: The Innovations of Rainer Hoch: A Pioneer in Microlithography

Introduction

Rainer Hoch, an esteemed inventor based in Aalen, Germany, has made significant contributions to the field of microlithography, particularly through his innovative inventions. With a remarkable portfolio of seven patents, Hoch’s work focuses on enhancing the precision and quality of projection lenses used in semiconductor manufacturing.

Latest Patents

Among his latest patents, two inventions stand out: the microlithographic projection exposure apparatus and a measuring device for evaluating the imaging quality of an EUV lens.

The microlithographic projection exposure apparatus is designed for immersion operation, incorporating an immersion liquid that fills the space between the last lens of the projection lens and the photosensitive layer. This technology aims to minimize fluctuations in the refractive index caused by temperature gradients in the immersion liquid. To achieve this, Hoch’s apparatus employs heat transfer elements that maintain a uniform temperature distribution, ensuring enhanced imaging consistency.

The measuring system developed for assessing the imaging quality of an EUV lens features an intricate setup including a diffractive test structure and a measurement light radiating device. This innovation allows for the analysis of the imaging quality by capturing an image stack at various parameters, ultimately providing a comprehensive evaluation of lens performance.

Career Highlights

Rainer Hoch’s career has been marked by influential roles in renowned companies, most notably at Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His work at these institutions has been pivotal in the advancement of optical technologies and microlithography.

Collaborations

Throughout his career, Hoch has collaborated with eminent professionals such as Ulrich Wegmann and Wolfgang Emer, collectively pushing the boundaries of innovation in their field. These partnerships have resulted in groundbreaking advancements that are widely recognized in the semiconductor industry.

Conclusion

Rainer Hoch stands as a notable figure in the realm of microlithography, with his inventive spirit driving progress within the sector. His seven patents reflect a dedication to improving technology that underpins modern manufacturing processes, making him a true pioneer in the landscape of innovation.