Peter S Thaulad

Title: The Innovations of Peter S Thaulad

Introduction

Peter S Thaulad, an accomplished inventor based in San Jose, CA, has made significant contributions to the field of robotics and substrate processing. With a remarkable portfolio of 10 patents, Thaulad's inventions focus on enhancing automation and precision in technological applications.

Latest Patents

Among his most recent innovations is a "Fixture for Automatic Calibration of Substrate Transfer Robot." This robot calibration system integrates a calibration fixture designed to be mounted within a substrate processing chamber. It features a camera that captures images of a test substrate's outer edge and the surrounding edge ring. A controller analyzes these images to calculate the center of the test substrate and calibrates the robot responsible for transferring substrates to and from the chamber accordingly.

Another notable patent is for "Auto-calibration to a Station of a Process Module that Spins a Wafer." This comprehensive method addresses a temperature-induced offset in the pedestal of a process module. It outlines a process for determining the offset by utilizing a robot to deliver a wafer, measuring entry and exit offsets during rotation, and calculating the magnitude and direction of any induced temperature offsets.

Career Highlights

Throughout his career, Peter S Thaulad has worked with prominent companies in the tech industry, including Lam Research Corporation and Novellus Systems Incorporated. His expertise is evidenced by the several patents he developed during his tenure, focusing on innovations in precision robotics and process modules.

Collaborations

In his journey as an inventor, Thaulad collaborated with notable professionals such as Richard M Blank and Jacob Lee Hiester. These partnerships have contributed to the successful development and implementation of his groundbreaking inventions.

Conclusion

Peter S Thaulad continues to drive innovation in robotics and substrate processing through his inventive spirit and technical prowess. His patents play an essential role in advancing automation technology, significantly impacting the efficiency and effectiveness of substrate transfer systems in the industry. As a respected figure in his field, Thaulad inspires future inventors to push the boundaries of technology.