The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Jul. 21, 2020
Lam Research Corporation, Fremont, CA (US);
Hossein Sadeghi, San Jose, CA (US);
Richard M. Blank, San Jose, CA (US);
Peter S. Thaulad, San Jose, CA (US);
Mark E. Emerson, Newberg, OR (US);
Arulselvam Simon Jeyapalan, Newark, CA (US);
Marco Piccigallo, Livermore, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Systems and techniques for determining and using multiple types of offsets for providing wafers to a wafer support of a wafer station of a semiconductor processing tool are disclosed; such techniques and systems may use an autocalibration wafer that may include a plurality of sensors, including a plurality of edge-located imaging sensors that may be used to image fiducials associated with two different structures located in a selected wafer station.