Company Filing History:
Years Active: 2019-2025
Title: Mark E Emerson: Innovator in Semiconductor Processing Technologies
Introduction
Mark E Emerson is a prominent inventor based in Newberg, Oregon, known for his significant contributions to the field of semiconductor processing. With a total of six patents to his name, Emerson has developed innovative technologies that enhance the efficiency and accuracy of wafer-handling robots.
Latest Patents
Emerson's latest patents include groundbreaking systems and techniques for automated wafer-handling robots. One of his notable inventions is the "Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check." This patent discloses methods for determining and utilizing multiple types of offsets to provide wafers to a wafer support of a semiconductor processing tool. The system employs an autocalibration wafer equipped with various sensors, including edge-located imaging sensors that image fiducials associated with different structures in a wafer station.
Another significant patent is the "Fixture for automatic calibration of substrate transfer robot." This invention features a calibration fixture designed to be mounted on a substrate processing chamber. The fixture includes a camera that captures images of a test substrate and its surrounding edge ring. A controller analyzes the captured image to measure the distance between the substrate's outer edge and the edge ring, calculates the substrate's center, and calibrates the robot responsible for transferring substrates to and from the processing chamber.
Career Highlights
Mark E Emerson is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve the performance of semiconductor manufacturing processes. Emerson's innovative spirit and technical expertise have made him a valuable asset to his organization.
Collaborations
Throughout his career, Emerson has collaborated with several talented individuals, including Nick Ray Linebarger, Jr. and Steven T Mayer. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Mark E Emerson's contributions to semiconductor processing technologies exemplify the impact of innovation in the industry. His patents and collaborative efforts continue to shape the future of wafer-handling systems, demonstrating the importance of creativity and technical skill in advancing technology.
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