Company Filing History:
Years Active: 2019-2025
Title: Arulselvam Simon Jeyapalan: Innovator in Wafer Handling Technology
Introduction
Arulselvam Simon Jeyapalan is a notable inventor based in Newark, CA (US). He has made significant contributions to the field of semiconductor processing through his innovative designs and technologies. With a total of 3 patents to his name, Jeyapalan continues to push the boundaries of what is possible in wafer handling systems.
Latest Patents
One of Jeyapalan's latest patents is for a wafer handling robot equipped with a gravitational field sensor. This invention discloses techniques and systems for automatically determining and correcting the levelness of a wafer handling robot end effector. The systems utilize a tilt sensor or a gravitational field sensor that can be calibrated to the robot. The output from the tilt sensor is instrumental in estimating the tilt of the end effector and performing correctional positioning to minimize or eliminate tilt. This technology also allows for automatic teaching of positions that have reduced tilt, health checks on the robot, and user feedback.
Another significant patent involves integrated adaptive positioning systems and routines for automated wafer-handling robots. This patent outlines systems and techniques for determining and utilizing multiple types of offsets to provide wafers to a wafer support of a semiconductor processing tool. The techniques may include an autocalibration wafer with various sensors, including edge-located imaging sensors that can image fiducials associated with different structures in a selected wafer station.
Career Highlights
Arulselvam Simon Jeyapalan is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on enhancing the efficiency and accuracy of wafer handling processes, which are critical in semiconductor manufacturing.
Collaborations
Jeyapalan collaborates with several talented individuals in his field, including Richard M Blank and Peter S Thaulad. These collaborations foster innovation and contribute to the advancement of technology in wafer handling.
Conclusion
Arulselvam Simon Jeyapalan is a prominent inventor whose work in wafer handling technology has made a significant impact on the semiconductor industry. His innovative patents and contributions continue to shape the future of semiconductor processing.