The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Mar. 30, 2007
Rich Blank, San Jose, CA (US);
Peter Thaulad, San Jose, CA (US);
Wayne Tang, Union City, CA (US);
Kevin Bertsch, Tigard, OR (US);
Paul Franzen, West Linn, OR (US);
Ken Reynolds, San Jose, CA (US);
Rich Blank, San Jose, CA (US);
Peter Thaulad, San Jose, CA (US);
Wayne Tang, Union City, CA (US);
Kevin Bertsch, Tigard, OR (US);
Paul Franzen, West Linn, OR (US);
Ken Reynolds, San Jose, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.