Company Filing History:
Years Active: 2005-2024
Title: Wayne Tang: Innovator in Wafer Measurement and Robotics
Introduction
Wayne Tang is a notable inventor based in Union City, CA (US), recognized for his contributions to the fields of wafer measurement and robotics. With a total of 4 patents, he has made significant advancements that enhance the efficiency and accuracy of various technologies.
Latest Patents
Among his latest patents, Wayne Tang has developed an integrated wafer bow measurement system. This innovative system includes a measurement unit with a wafer support assembly that imparts rotational movement to the measured wafer. It features an optical sensor, a calibration standard for sensor calibration, a linear stage actuator for linear movement, a wafer centering sensor for determining the centering of the wafer, and a wafer alignment sensor for assessing the alignment of the wafer.
Another significant invention is the magnetic rotational hardstop for robots. This assembly allows for greater than 360 degrees of non-continuous rotation for rotating mechanisms. In certain embodiments, it provides 630 or more degrees of rotation for the shoulder axis of a robot, such as a wafer transfer robot. The design incorporates opposing magnets that function as springs, ensuring non-contact engagement, which eliminates contact noise and wear over time.
Career Highlights
Wayne Tang has worked with prominent companies in the technology sector, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has contributed to his expertise in developing innovative solutions in wafer measurement and robotics.
Collaborations
Throughout his career, Wayne has collaborated with talented individuals such as Rich Blank and Damon Tyrone Genetti. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Wayne Tang's contributions to the fields of wafer measurement and robotics demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology and improving operational efficiencies in various applications.
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