The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Jun. 20, 2003
Damon Genetti, Los Gatos, CA (US);
Wayne Tang, Union City, CA (US);
Mikhail Bojinov, Sunnyvale, CA (US);
Stephan Minard, Pleasanton, CA (US);
Damon Genetti, Los Gatos, CA (US);
Wayne Tang, Union City, CA (US);
Mikhail Bojinov, Sunnyvale, CA (US);
Stephan Minard, Pleasanton, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.