Peng Chang

Title: Innovations of Peng Chang in Semiconductor Manufacturing

Introduction

Peng Chang is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on advanced methods for forming copper wiring and semiconductor devices, which are crucial for modern electronics.

Latest Patents

Among his latest patents, Peng Chang has developed a Cu wiring forming method and a semiconductor device manufacturing method. The Cu wiring forming method involves several intricate processes. It includes forming a barrier film on a substrate with a trench and a via, followed by creating a wetting target layer of Ru. A Cu-based seed film is then formed using physical vapor deposition (PVD), which is filled into the via by heating the substrate. Finally, a Cu-based film is created on the substrate surface under specific conditions to ensure proper filling of the trench.

The method of manufacturing Cu wiring also showcases his innovative approach. In this method, a MnO film acts as a self-formed barrier film through a reaction with the interlayer insulating film. A hydrogen radical process is performed to reduce the surface of the MnO film, followed by the formation of a Ru film through chemical vapor deposition (CVD). A Cu-based film is then deposited on the Ru film using PVD, ensuring high surface smoothness and effective filling of the recess.

Career Highlights

Peng Chang is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor manufacturing, making him a valuable asset to his organization.

Collaborations

Throughout his career, Peng has collaborated with notable colleagues such as Hiroyuki Nagai and Kenji Matsumoto. These collaborations have further enhanced his research and development efforts in the semiconductor field.

Conclusion

Peng Chang's innovative contributions to semiconductor manufacturing highlight his expertise and dedication to advancing technology. His patents reflect a deep understanding of complex processes that are essential for the future of electronics.