Payam Tayebati

Title: Payam Tayebati: Innovator in Optical Imaging Technology

Introduction

Payam Tayebati is a distinguished inventor based in Ulm, Germany. He has made significant contributions to the field of optical imaging, particularly in microlithography. With a total of 8 patents to his name, Tayebati's work has advanced the technology used in various applications.

Latest Patents

One of his latest patents is an optical imaging device with thermal attenuation. This innovative device is designed for use in microlithography and includes a mask device for receiving a mask with a projection pattern. The projection device consists of an optical element group that projects the pattern onto a substrate. The device features an immersion zone, where the substrate is temporarily located adjacent to an immersion element during operation. This immersion zone is filled with an immersion medium, and a thermal attenuation device is incorporated to reduce temperature fluctuations in the immersion element caused by the medium.

Career Highlights

Throughout his career, Payam Tayebati has worked with notable companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has allowed him to refine his expertise in optical technologies and contribute to groundbreaking innovations.

Collaborations

Some of his coworkers include Markus Hauf and Arif Kazi, who have collaborated with him on various projects, enhancing the development of optical imaging technologies.

Conclusion

Payam Tayebati's contributions to optical imaging technology have established him as a prominent figure in the field. His innovative patents and collaborations reflect his commitment to advancing technology in microlithography.