Veldhoven, Netherlands

Paulus Martinus Maria Liebregts

This inventor holds 34 USPTO granted patents and 1 published patent application, primarily in Lithography Technology. Top assignee: Asml Netherlands B.v.. Active years: 2005-2020.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Paulus Martinus Maria Liebregts. Retrieved from https://idiyas.com/inventor/paulus-martinus-maria-liebregts

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 34 

% Patents Active = 64.7

Average Co-Inventor Count = 6.4

ph-index = 6

Forward Citations = 98(Granted Patents)


Company Filing History:


Years Active: 2005-2020

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Areas of Expertise:
Lithographic Apparatus
Fluid Handling Structure
Device Manufacturing Method
Immersion Lithography
Projection Apparatus
Coated Film
Gas Supply
Removable Member
Control Method
Veldhoven
Manufacturing Techniques
34 patents (USPTO):Explore Patents

Title: Unveiling the Innovations of Paulus Martinus Maria Liebregts in the Field of Lithography

Introduction: Paulus Martinus Maria Liebregts is a renowned inventor based in Veldhoven, Netherlands, with an impressive track record of 34 patents to his name. His groundbreaking work in the realm of lithography, particularly in immersion lithographic apparatus, has placed him at the forefront of technological advancements in the industry.

Latest Patents: Among his latest patents is an immersion lithographic apparatus designed to enhance the fluid supply system. This system features a chamber with strategically positioned inlet and outlet holes to optimize the direction of fluid flow, improving the overall efficiency of the lithographic process. Additionally, Liebregts has developed a novel fluid handling structure that plays a crucial role in device manufacturing methods within lithographic apparatus, incorporating elements such as elongate openings and gas knife devices for enhanced performance.

Career Highlights: Paulus Martinus Maria Liebregts is a valued member of the renowned company ASML Netherlands B.V., a leading player in the semiconductor industry. His contributions have significantly impacted the research and development efforts within the organization, driving forward innovation in lithographic technologies.

Collaborations: Throughout his career, Liebregts has had the pleasure of collaborating with esteemed professionals in the field, including his coworkers Michel Riepen and Martinus Hendrikus Antonius Leenders. Together, they have synergized their expertise to push the boundaries of technological advancements and achieve remarkable milestones in the realm of lithography.

Conclusion: In conclusion, Paulus Martinus Maria Liebregts stands as a visionary inventor whose remarkable contributions in the field of lithography have reshaped the industry landscape. His inventive spirit, coupled with his dedication to advancing technological frontiers, continues to inspire future generations of innovators in the pursuit of excellence.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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