The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Nov. 15, 2010
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Roelof Frederik DE Graaf, Veldhoven, NL;
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Martinus Hendrikus Antonius Leenders, Rhoon, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Gerardus Martinus Antonius DE Rooij, Tilburg, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Vijay Kumar Badam, Eindhoven, NL;
Johanna Antoinette Maria Sondag-huethorst, Valkenswaard, NL;
Niek Elout DE Kruijf, Eindhoven, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Roelof Frederik De Graaf, Veldhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Martinus Hendrikus Antonius Leenders, Rhoon, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Gerardus Martinus Antonius De Rooij, Tilburg, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Vijay Kumar Badam, Eindhoven, NL;
Johanna Antoinette Maria Sondag-Huethorst, Valkenswaard, NL;
Niek Elout De Kruijf, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A member is provided to prevent immersion liquid ingress to a gap between components or to adhere to at least one component to provide a surface to a feature of an immersion system. The member has a plastic sealing portion that is adhered to the component(s). The plastic sealing portion is opaque to DUV radiation. It may be resistant to degradation through exposure to DUV radiation. It may have a liquid phobic coating or property.