This inventor holds 36 USPTO granted patents and 6 published patent applications and 1 EPO patent, primarily in Radical Processing Techniques. Top assignee: Applied Materials, Inc.. Active years: 2004-2026.
Location History:
- Sunnyvale, CA (US) (2004)
- San Jose, CA (US) (2009 - 2024)
- Cupertino, CA (US) (2016 - 2024)
Company Filing History:
Years Active: 2004-2026
Areas of Expertise:
Title: **Norman L. Tam: Innovator in Semiconductor Processing**
Introduction
Norman L. Tam, based in Cupertino, California, is a notable inventor in the field of semiconductor processing. With an impressive portfolio of 31 patents, Tam has made significant contributions to the advancements in technology that underpin modern electronics.
Latest Patents
Among his latest innovations are two noteworthy patents. The first, titled "Thermal chamber with improved thermal uniformity," focuses on a semiconductor processing chamber designed to enhance thermal uniformity. This chamber features a unique design, including a chamber body with a substrate transfer port and strategically positioned absorber bodies within the interior volume.
The second patent, titled "Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation," outlines a method of processing semiconductor substrates. This method involves pre-heating substrates and exposing them to species radicals at controlled temperatures and pressures, followed by an annealing process to optimize electronic properties.
Career Highlights
Norman L. Tam's career has been significantly shaped by his role at Applied Materials, Inc., a leading company in the semiconductor industry. His expertise and innovation have positioned him as a key figure in the development of new technologies that drive efficiency and performance in semiconductor manufacturing.
Collaborations
Throughout his career, Tam has collaborated with esteemed professionals, including Mehran Behdjat and Joseph Michael Ranish. These partnerships have enabled the exchange of ideas and accelerated advancements in their field, contributing to the successful development of groundbreaking technologies.
Conclusion
Norman L. Tam stands out as a prolific inventor whose work continues to influence the semiconductor industry. With a strong focus on improving processes for semiconductor substrates, he exemplifies the spirit of innovation and the pursuit of excellence in technology. His contributions will likely pave the way for future advancements in the field.