The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Feb. 23, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Pradeep Sampath Kumar, Agra, IN;
Norman L. Tam, Cupertino, CA (US);
Shashank Sharma, Fremont, CA (US);
Eric R. Rieske, Livermore, CA (US);
Victor Calderon, Sunnyvale, CA (US);
Mahesh Ramakrishna, Basaveshwaranagar, IN;
Michael P. Kamp, San Ramon, CA (US);
Dongming Iu, Union City, CA (US);
Edward T. Xia, Santa Clara, CA (US);
Eric T. Tran, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of post-deposition processing includes performing a preheat process in a radical treatment chamber, the preheat process comprising exposing a substrate having a metal layer formed thereon to purge gas and purging the purge gas at a pressure of between 400 Torr and 535 Torr, and performing a radical treatment process in the radical treatment chamber, the radical treatment process comprising exposing the substrate to radical species.