Koshi, Japan

Noritaka Uchida



Average Co-Inventor Count = 4.2

ph-index = 3

Forward Citations = 29(Granted Patents)


Location History:

  • Tosu, JP (2010)
  • Tokyo, JP (2014)
  • Koshi, JP (2010 - 2021)

Company Filing History:


Years Active: 2010-2021

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9 patents (USPTO):Explore Patents

Title: Noritaka Uchida: Innovator in Substrate Processing Technologies

Introduction

Noritaka Uchida is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 9 patents. His work focuses on improving the efficiency and effectiveness of substrate processing methods and apparatuses.

Latest Patents

Uchida's latest patents include a substrate processing apparatus and method aimed at minimizing contamination on the bottom surface of a substrate during cleaning. This innovation allows for simultaneous liquid processing on both the top and bottom surfaces of the substrate while it is rotated. The control unit effectively manages the supply of processing liquids to ensure optimal cleaning results. Another notable patent involves a rear substrate surface polishing device and system. This technology enhances the polishing process by utilizing information from prior processes to determine the polishing area and method, ensuring a high-quality finish on the substrate.

Career Highlights

Uchida is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing substrate processing technologies, making significant impacts on the efficiency of manufacturing processes.

Collaborations

Uchida has collaborated with notable coworkers, including Takehiko Orii and Kenji Sekiguchi. Their combined expertise has contributed to the development of innovative solutions in substrate processing.

Conclusion

Noritaka Uchida's contributions to substrate processing technologies have established him as a key figure in the field. His innovative patents and collaborative efforts continue to drive advancements in manufacturing efficiency.

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