Company Filing History:
Years Active: 2013-2024
Title: Norihiko Sugie: Innovator in Chemical-Mechanical Polishing
Introduction
Norihiko Sugie is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of chemical-mechanical polishing, holding a total of seven patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor substrate polishing processes.
Latest Patents
One of Sugie's latest patents is a composition for chemical-mechanical polishing and a method that allows for the flat and high-speed polishing of semiconductor substrates containing conductive metals such as tungsten or cobalt. This innovation not only improves the polishing speed but also reduces surface defects after the process. The composition includes silica particles with a functional group and a silane compound, which plays a crucial role in achieving the desired results.
Another notable patent involves a radiation-sensitive resin composition, which consists of a polymer component, a radiation-sensitive acid generating agent, and a nitrogen-containing compound with a ring structure. This composition is designed to enhance the formation of resist patterns, showcasing Sugie's versatility in addressing various challenges in semiconductor manufacturing.
Career Highlights
Norihiko Sugie is currently employed at JSR Corporation, where he continues to push the boundaries of innovation in his field. His expertise in chemical-mechanical polishing has positioned him as a key figure in the semiconductor industry.
Collaborations
Sugie collaborates with talented individuals such as Norihiro Natsume and Daita Kouno, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Norihiko Sugie's contributions to the field of chemical-mechanical polishing are invaluable. His innovative patents and collaborative efforts at JSR Corporation highlight his commitment to advancing semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.