The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Mar. 23, 2011
Applicants:
Kazunori Kusabiraki, Tokyo, JP;
Takahiro Hayama, Tokyo, JP;
Norihiko Sugie, Tokyo, JP;
Motoyuki Shima, Tokyo, JP;
Kiyoshi Tanaka, Tokyo, JP;
Inventors:
Kazunori Kusabiraki, Tokyo, JP;
Takahiro Hayama, Tokyo, JP;
Norihiko Sugie, Tokyo, JP;
Motoyuki Shima, Tokyo, JP;
Kiyoshi Tanaka, Tokyo, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/004 (2006.01); G03F 7/11 (2006.01);
U.S. Cl.
CPC ...
Abstract
An upper-layer film-forming composition includes (A) a resin that is soluble in an alkaline aqueous solution, and includes a fluorine atom, and (B) a solvent component that includes (B1) a solvent having a boiling point at 101.3 kPa of 150° C. or more and a static surface tension of 23.0 mN/m or less, the upper-layer film-forming composition being used to form an upper-layer film on a photoresist film.