Location History:
- Koshi-Machi, JP (2006 - 2007)
- Kumamoto, JP (2001 - 2011)
- Koshi, JP (2011 - 2014)
Company Filing History:
Years Active: 2001-2014
Title: Nobuyuki Sata: Innovator in Heat Processing Technology
Introduction
Nobuyuki Sata is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of heat processing technology, holding a total of 13 patents. His work focuses on improving the efficiency and uniformity of temperature settings in heat processing plates, which is crucial for various industrial applications.
Latest Patents
Among his latest patents are the "Temperature setting method of heat processing plate," "Temperature setting apparatus of heat processing plate," and a related program and computer-readable recording medium. The primary objective of these inventions is to ensure that a wafer is uniformly heated during the actual heat processing time. The method involves measuring the temperature of a wafer from the moment it is placed on the heating plate until the heat processing time elapses. If the temperature uniformity is not acceptable, a correction value for the temperature setting parameter is calculated and adjusted accordingly.
Career Highlights
Nobuyuki Sata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing heat processing technologies.
Collaborations
Nobuyuki has collaborated with notable colleagues such as Eiichi Shirakawa and Shuji Iwanaga, contributing to the development of cutting-edge technologies in their field.
Conclusion
Nobuyuki Sata's contributions to heat processing technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, ensuring advancements in manufacturing processes.