The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Dec. 21, 2006
Nobuyuki Sata, Kumamoto, JP;
Takahiro Kitano, Kumamoto, JP;
Tetsuo Fukuoka, Koshi, JP;
Toshiyuki Matsumoto, Sanda, JP;
Tomohide Minami, Nishinomiya, JP;
Nobuyuki Sata, Kumamoto, JP;
Takahiro Kitano, Kumamoto, JP;
Tetsuo Fukuoka, Koshi, JP;
Toshiyuki Matsumoto, Sanda, JP;
Tomohide Minami, Nishinomiya, JP;
Tokyo Electron Limited, , JP;
Abstract
This invention provides a wafer-type temperature sensor capable of eliminating the need for an A/D converter, adapting itself to automation and improving the heat resistance to measure temperature distribution of the upper surface of a wafer, a temperature measuring device using the sensor, a thermal processor having a temperature measurement function and a temperature measurement method. The wafer-type temperature sensor comprises a wafer and a plurality of temperature sensors arranged in regions which are formed by segmenting the upper surface of the wafer into a plurality of regions. Each of the temperature sensors includes an oscillation circuit for oscillating a frequency signal corresponding to the temperature of its own region within a frequency band that is different for every region in response to input of power supply voltage.