The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Feb. 03, 1999
Applicant:
Inventors:
Eiichi Shirakawa, Kumamoto, JP;
Nobuyuki Sata, Kumamoto, JP;
Assignee:
Tokyo Electron Limited, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27B 5/04 ;
U.S. Cl.
CPC ...
F27B 5/04 ;
Abstract
A heating treatment apparatus comprises a hot plate on which a substrate to be processed is to be mounted, a heater for heating the hot plate, a plurality of first sensors for detecting temperatures of a plurality of portions of the hot plate, respectively, a second sensor for detecting temperature of a representative portion of the hot plate, and a controller for controlling a heat generating operation of the heater on the basis of a plurality of first detection temperatures detected by the first sensors respectively and a second detection temperature detected by the second sensor, thereby controlling temperature of the hot plate.