The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Jun. 16, 2004
Applicant:
Nobuyuki Sata, Koshi-Machi, JP;
Inventor:
Nobuyuki Sata, Koshi-Machi, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A reference value, which defines electric power to be supplied to a heating element, is generated. Deviation ΔT of temperature Tmeasured by a radiation thermometer from target temperature Tdefined by a target temperature rising curve is determined. Compensation value is determined based on the deviation ΔT and the temperature T. The reference value is multiplied by the compensation value. The heating element is supplied with electric power according to the corrected reference value.