Tama, Japan

Nobuo Matsuki


Average Co-Inventor Count = 2.4

ph-index = 16

Forward Citations = 5,690(Granted Patents)


Location History:

  • Tami, JP (2005)
  • Tokyo, JP (2000 - 2010)
  • Tama, JP (2002 - 2011)

Company Filing History:


Years Active: 2000-2011

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36 patents (USPTO):Explore Patents

Title: Nobuo Matsuki: Pioneering Innovations in Silicon-Based Technologies

Introduction: Nobuo Matsuki, located in Tama, Japan, is a prominent inventor with a remarkable portfolio of 36 patents primarily focused on silicon-based materials and processes. His innovative work continues to push the boundaries of technology in the semiconductor industry.

Latest Patents: Matsuki's latest inventions showcase his expertise and creativity. One of his key patents is a Method for Forming Silicon Carbide Film Containing Oxygen, which outlines a process for depositing a silicon carbide film on a substrate. This method involves introducing a precursor that contains Si, C, O, and H, along with an inert gas, and utilizing RF power to achieve the desired film composition. Additionally, he holds a patent for a Method for Forming Dielectric Film Using Siloxane-Silazane Mixture, which describes the deposition of a siloxane-based film through plasma reaction, followed by an annealing process to refine the material.

Career Highlights: Throughout his career, Nobuo Matsuki has contributed to leading companies in the technology sector, including Asm Japan K.K. and Samsung Electronics Co., Ltd. His role in these companies has enabled him to develop significant advancements in semiconductor manufacturing processes, establishing him as a key figure in the industry.

Collaborations: Matsuki has collaborated with talented coworkers such as Atsuki Fukazawa and Yoshinori Morisada. Their joint efforts have contributed to the further development of innovative technologies in the field, enhancing the potential applications of Matsuki's patents.

Conclusion: Nobuo Matsuki's innovative contributions to silicon-based technologies and his extensive patent portfolio reflect his significant impact on the industry. As a dedicated inventor, his work continues to shape the future of semiconductor manufacturing, paving the way for new technological advancements.

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