Location History:
- Yongin-shi, KR (2000)
- Yongin-si, KR (2004)
- Gyeonggi-do, KR (2009)
- Suwon, KR (2009 - 2013)
Company Filing History:
5 out of 131,214 
2 out of 441 
Years Active: 2000-2013
Title: No-Hyun Huh: Innovator in Vacuum Processing Technology
Introduction
No-Hyun Huh is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of vacuum processing technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is an etching apparatus and etching method. This invention features a vacuum processing apparatus equipped with a vacuum processing tank. It includes a first gas introduction section that allows a first processing gas in a radical state to be introduced into the vacuum processing tank and guided to a semiconductor wafer. Additionally, a second gas introduction section is designed to introduce a second processing gas that reacts with the first processing gas, ensuring high-speed processing of multiple processing objects while maintaining in-plane uniformity after processing.
Another notable patent is an ion implanter with etch prevention members. This apparatus and method involve a process chamber where ion implantation occurs. It includes a support unit that holds the substrate and is electrically connected to a power source for generating high-frequency pulses. The conductive unit, separated from the support unit, generates plasma during the ion implantation process. This unit is equipped with an etch prevention member to protect it from being etched by the source gas used to generate the plasma.
Career Highlights
No-Hyun Huh has worked with leading companies in the industry, including Samsung Electronics Co., Ltd. and Ulvac, Inc. His experience in these organizations has allowed him to develop innovative solutions that address the challenges faced in semiconductor manufacturing.
Collaborations
He has collaborated with notable coworkers such as Ki-Young Yun and Il-Kyoung Kim, contributing to advancements in their respective fields.
Conclusion
No-Hyun Huh's contributions to vacuum processing technology and semiconductor manufacturing are noteworthy. His innovative patents and collaborations reflect his commitment to advancing the industry. His work continues to influence the development of efficient manufacturing processes in the semiconductor sector.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.