Nirasaki, Japan

Naoyuki Satoh


Average Co-Inventor Count = 3.4

ph-index = 3

Forward Citations = 476(Granted Patents)


Location History:

  • Nirasaki, JP (2009 - 2017)
  • Miyagi, JP (2017 - 2023)

Company Filing History:


Years Active: 2009-2023

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18 patents (USPTO):Explore Patents

Title: Naoyuki Satoh: A Pioneer in Substrate Processing Technologies

Introduction

Naoyuki Satoh is an accomplished inventor based in Nirasaki, Japan. With a remarkable portfolio of 18 patents, he has made significant contributions in the field of substrate processing technologies. His innovative designs have paved the way for advancements in the manufacturing industry.

Latest Patents

Among his most recent innovations are the substrate placing table and substrate processing apparatus. The substrate placing table features a sophisticated design that incorporates a base and an electrostatic chuck. This electrostatic chuck is comprised of a lamination layer portion, an intermediate layer, and a covering layer, combining layers of various materials to enhance functionality. The design includes a specific arrangement of layers, including a resin layer and a ceramics covering layer.

Additionally, Satoh has developed a member for plasma processing apparatus that includes a tungsten carbide phase. This member uniquely comprises atoms such as iron, cobalt, and nickel, with precise atomic content to optimize performance in plasma processing applications.

Career Highlights

Naoyuki Satoh has gained valuable experience through his roles at prominent companies like Tokyo Electron Limited and Octec, Inc. His innovative spirit and technical expertise have helped these organizations remain competitive in an ever-evolving technological landscape.

Collaborations

Throughout his career, Satoh has collaborated with esteemed professionals, including Nobuyuki Nagayama and Keiichi Nagakubo. These partnerships have allowed him to advance his research and develop superior technologies that address the needs of the industry.

Conclusion

In summary, Naoyuki Satoh is a key figure in the realm of substrate processing innovations. His extensive patent portfolio and collaborative efforts underline his commitment to pushing technological boundaries. As he continues to innovate, his contributions are poised to make a lasting impact on the industry.

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