The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Mar. 25, 2020
Applicants:
Nippon Tungsten Co., Ltd., Fukuoka, JP;
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takashi Ikeda, Fukuoka, JP;
Hajime Ishii, Fukuoka, JP;
Kenji Fujimoto, Fukuoka, JP;
Naoyuki Satoh, Miyagi, JP;
Nobuyuki Nagayama, Miyagi, JP;
Koichi Murakami, Miyagi, JP;
Takahiro Murakami, Miyagi, JP;
Assignees:
NIPPON TUNGSTEN CO., LTD., Fukuoka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 35/56 (2006.01); C23F 4/00 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C04B 35/5626 (2013.01); C23F 4/00 (2013.01); H01L 21/67069 (2013.01); C04B 2235/3847 (2013.01); C04B 2235/405 (2013.01); C04B 2235/963 (2013.01); C04B 2235/9669 (2013.01); H01J 37/3244 (2013.01); H01J 37/32477 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01);
Abstract
Provided is a member for a plasma processing apparatus consisting of a tungsten carbide phase. The member includes at least one type of atom selected from the group consisting of a Fe atom, a Co atom, and a Ni atom, in which the total content of the atoms is in a range of 30 to 3300 atomic ppm.