The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Mar. 25, 2020
Nippon Tungsten Co., Ltd., Fukuoka, JP;
Tokyo Electron Limited, Tokyo, JP;
Takashi Ikeda, Fukuoka, JP;
Hajime Ishii, Fukuoka, JP;
Kenji Fujimoto, Fukuoka, JP;
Naoyuki Satoh, Miyagi, JP;
Nobuyuki Nagayama, Miyagi, JP;
Koichi Murakami, Miyagi, JP;
Takahiro Murakami, Miyagi, JP;
NIPPON TUNGSTEN CO., LTD., Fukuoka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A member for a plasma processing apparatus has a tungsten carbide phase, and a sub-phase including at least one selected from the group consisting of phase I to IV, and phase V, in which the phase I is a carbide phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase II is a nitride phase containing, as a constituent element, at least one of the elements of Group IV, V, and VI of the periodic table excluding W, the phase III is a carbonitride phase containing, as a constituent element, at least one of the elements of Group IV, Group V, and Group VI of the periodic table excluding W, the phase IV is a carbon phase, the phase V is a composite carbide phase which is represented by a formula WMC.