The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Jun. 15, 2012
Nobuyuki Nagayama, Nirasaki, JP;
Naoyuki Satoh, Nirasaki, JP;
Keiichi Nagakubo, Nirasaki, JP;
Kazuya Nagaseki, Nirasaki, JP;
Nobuyuki Nagayama, Nirasaki, JP;
Naoyuki Satoh, Nirasaki, JP;
Keiichi Nagakubo, Nirasaki, JP;
Kazuya Nagaseki, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of reusing a consumable part for use in a plasma processing apparatus includes cleaning a surface of the consumable part made of SiC that has been eroded by a first plasma process performed for a specific period of time. The method further includes depositing SiC on the cleaned surface of the eroded consumable part by CVD. The method also includes remanufacturing a consumable part having a predetermined shape by machining the eroded consumable part on which the SiC is deposited for performing a second plasma process on a substrate by using the remanufactured consumable part.