Location History:
- Nirasaki, JP (2008 - 2020)
- Yamanashi, JP (2014 - 2021)
Company Filing History:
Years Active: 2008-2021
Title: Keiichi Nagakubo: Innovator in Substrate Processing Technology
Introduction
Keiichi Nagakubo is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 17 patents. His work focuses on improving the efficiency and effectiveness of substrate transfer mechanisms and processing systems.
Latest Patents
Nagakubo's latest patents include a "Method for cleaning substrate transfer mechanism and substrate processing system." This innovative system features a heat treatment chamber designed to sublimate by-products through heat. It also includes a substrate carrier that loads substrates into the chamber, equipped with a holder and a controller that manages the operations of both the chamber and the carrier. The controller is programmed to maintain a specific temperature while preventing thermal damage to the substrate transfer mechanism.
Another notable patent is the "Substrate processing apparatus and method of transferring substrate." This apparatus includes a transfer arm capable of moving two substrates simultaneously between a transfer chamber and a processing chamber. The design allows the substrates to overlap with a gap, enhancing the transfer process. It is equipped with detection sensors to ensure accurate positioning during the transfer.
Career Highlights
Keiichi Nagakubo is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing substrate processing technologies, making significant impacts on the efficiency of semiconductor production.
Collaborations
Throughout his career, Nagakubo has collaborated with notable colleagues, including Naoyuki Satoh and Nobuyuki Nagayama. These collaborations have fostered innovation and contributed to the development of cutting-edge technologies in the field.
Conclusion
Keiichi Nagakubo's contributions to substrate processing technology are noteworthy, with a strong portfolio of patents that reflect his innovative spirit. His work continues to influence the semiconductor industry, showcasing the importance of advancements in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.