Location History:
- Kobe, JP (1988)
- Amagasaki, JP (1990)
- Kakogawa, JP (1994 - 1996)
- Hyogo, JP (1998 - 2005)
- Tokyo, JP (2000 - 2010)
Company Filing History:
6 out of 21,351 
6 out of 35 
3 out of 177 
Years Active: 1988-2010
Title: Minoru Hanazaki: Innovator in Semiconductor Manufacturing
Introduction
Minoru Hanazaki is a prominent inventor based in Hyogo, Japan, known for his significant contributions to the field of semiconductor manufacturing. With a total of 18 patents to his name, Hanazaki has developed innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor production processes.
Latest Patents
One of Hanazaki's latest patents is a manufacturing method for semiconductor integrated circuit devices. This invention addresses challenges in remote plasma cleaning, which often struggles with local plasma excitation due to unsuitable conditions. The method involves depositing a desired film by exciting a reaction gas using plasma in a reaction chamber, followed by introducing a cleaning gas excited in a remote plasma excitation chamber. This process is repeated to ensure effective cleaning without plasma excitation. Another notable patent is a plasma processing apparatus that evaluates process performance. This apparatus utilizes a high-frequency current detector to monitor the high-frequency current produced when power is supplied to the chamber. The system compares this current with a reference to determine the normality of the process performance.
Career Highlights
Throughout his career, Hanazaki has worked with notable companies, including Mitsubishi Electric Corporation and Maruo Calcium Company Limited. His experience in these organizations has allowed him to refine his expertise in semiconductor technology and contribute to advancements in the field.
Collaborations
Hanazaki has collaborated with esteemed colleagues such as Masaaki Tsuchihashi and Shiro Minayoshi. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Minoru Hanazaki's work in semiconductor manufacturing showcases his dedication to innovation and problem-solving in the industry. His patents reflect a deep understanding of the complexities involved in semiconductor production, making him a key figure in this technological field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.