Hwaseong-si, South Korea

Minhwan Seo

USPTO Granted Patents = 7 

Average Co-Inventor Count = 8.6

ph-index = 1


Company Filing History:


Years Active: 2023-2025

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7 patents (USPTO):

Title: Innovations by Inventor Minhwan Seo

Introduction: Minhwan Seo is a notable inventor based in Hwaseong-si, South Korea. With a total of five patents to his name, he has made significant contributions to the field of technology, particularly in developing advanced sensors and processing apparatus for the semiconductor industry.

Latest Patents: Among his latest innovations are two groundbreaking patents:

1. **Level sensor and substrate processing apparatus**: This invention features a level sensor designed to detect the height level of a substrate. The sensor comprises a measurement light source that radiates measurement light, a prism that splits reflected light into first and second polarized light while generating an optical path length difference, and an optical path length modulator to maintain a constant optical path for the first polarized light. Additionally, it includes a detector to measure the first optical path length difference based on the interference signal between the two polarized lights.

2. **Polarization measuring device and method of fabricating semiconductor device using the same**: This device consists of a measurement stage, a light source assembly for emitting incident light, and two polarimeters that help in polarizing both the incident and reflected light from the measurement target. The system also includes a filter assembly for noise reduction and a detector that measures both the intensity and phase of the reflected light.

Career Highlights: Minhwan Seo is currently employed at Samsung Electronics Co., Ltd., a global leader in technology and electronics. His work mainly focuses on innovations that support semiconductor fabrication processes, showcasing his expertise and advancing the industry standards.

Collaborations: Throughout his career, Minhwan has collaborated with talented colleagues such as Sangwoo Bae and Ingi Kim. Together, they continue to pursue innovative solutions that enhance the efficiency and effectiveness of semiconductor technology.

Conclusion: Minhwan Seo is a remarkable inventor whose contributions have greatly impacted the field of semiconductor technology. With five patents under his belt and ongoing collaborations at Samsung Electronics, he exemplifies the spirit of innovation in modern engineering. His inventions refine manufacturing processes, ensuring that the industry not only keeps pace with demand but also fosters continual advancement.

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