The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Sep. 24, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Dongyun Chung, Suwon-si, KR;
Sinyong Lee, Suwon-si, KR;
Jiyoung Chu, Suwon-si, KR;
Ingi Kim, Suwon-si, KR;
Minhwan Seo, Suwon-si, KR;
Hyungjin Kim, Suwon-si, KR;
Sangwoo Bae, Suwon-si, KR;
Akinori Okubo, Suwon-si, KR;
Jungchul Lee, Suwon-si, KR;
Jaeho Jin, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
Provided is a semiconductor measurement system including a laser configured to output a light having multiple wavelengths, a broadband spectrometer configured to receive the light and output monochromatic light having a single wavelength, a measurement device configured to obtain physical information of a sample based on the monochromatic light, and a computing device configured to inspect or measure the sample based on the obtained physical information, wherein the broadband spectrometer is further configured to remove polarization dependence of the light based on a wavelength and a polarization separating/combining device.