Company Filing History:
Years Active: 2018-2025
Title: Akinori Okubo: Innovator in Substrate Processing Technologies
Introduction
Akinori Okubo is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate processing, holding a total of five patents. His work focuses on developing advanced technologies that enhance the efficiency and accuracy of substrate measurement and processing.
Latest Patents
One of Okubo's latest patents is a level sensor and substrate processing apparatus. This invention is designed to detect the height level of a substrate. The level sensor includes a measurement light source that radiates light toward the substrate. It also features a prism that splits the reflected light into first and second polarized light, generating an optical path length difference. Additionally, an optical path length modulator maintains a constant optical path for the first polarized light while periodically changing the second. A detector is included to measure the optical path length difference based on the interference signal between the two polarized lights.
Another notable patent is a polarization measuring device and method for fabricating semiconductor devices. This device comprises a stage for the measurement target, a light source assembly for emitting incident light, and two polarimeters for polarizing both the incident and reflected light. A filter assembly is used to eliminate noise from the reflected light, while a detector measures the intensity and phase of the reflected light.
Career Highlights
Akinori Okubo is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the capabilities of substrate processing equipment.
Collaborations
Okubo collaborates with talented colleagues, including Sangwoo Bae and Minhwan Seo, who contribute to the development of cutting-edge technologies in their field.
Conclusion
Akinori Okubo's contributions to substrate processing technologies through his innovative patents highlight his expertise and commitment to advancing the industry. His work at Samsung Electronics Co., Ltd. continues to influence the future of semiconductor manufacturing.