Company Filing History:
Years Active: 2016-2023
Title: Innovations of Michael Gehmlich
Introduction
Michael Gehmlich is a notable inventor based in Weissenborn, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on the production of high-quality silicon wafers, which are essential components in modern electronics.
Latest Patents
One of Gehmlich's latest patents is a method for producing a semiconductor wafer composed of monocrystalline silicon. This innovative method involves double side polishing a single-crystal silicon substrate wafer. The front side of the substrate wafer undergoes chemical mechanical polishing (CMP), followed by the deposition of an epitaxial layer of single-crystal silicon. A first rapid thermal anneal (RTA) treatment is performed at temperatures between 1275-1295°C for 15-30 seconds in an argon and oxygen atmosphere. The coated substrate wafer is then cooled to 800°C or below, using 100% argon. A second RTA treatment is conducted at 1280-1300°C for 20-35 seconds in argon. Finally, an oxide layer is removed from the front side of the coated substrate wafer, which is then polished by CMP. This process results in a semiconductor wafer composed of single-crystal silicon with high gate oxide breakdown, suitable for NAND circuitry.
Career Highlights
Michael Gehmlich is currently employed at Siltronic AG, a leading company in the semiconductor industry. His expertise in semiconductor manufacturing has positioned him as a key player in the development of advanced technologies.
Collaborations
Gehmlich has collaborated with several professionals in his field, including Timo Mueller and Frank Faller. Their combined efforts contribute to the advancement of semiconductor technologies and innovations.
Conclusion
Michael Gehmlich's work in semiconductor technology exemplifies the importance of innovation in the electronics industry. His patents and contributions continue to influence the development of high-quality silicon wafers.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.