Company Filing History:
Years Active: 2002-2007
Title: The Innovative Contributions of Matthew R VanHanehem
Introduction
Matthew R VanHanehem is a notable inventor based in Bear, DE (US). He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on developing advanced polishing compositions that enhance the manufacturing processes of semiconductor wafers.
Latest Patents
One of his latest patents is for a high-rate barrier polishing composition. This innovative solution is designed to effectively remove barrier materials from semiconductor substrates. The composition includes a specific weight percentage of oxidizers, inhibitors for nonferrous metals, abrasives, complexing agents, and barrier removal agents, all balanced with water. The barrier removal agents are selected from imine and hydrazine derivative compounds, showcasing his expertise in chemical formulations.
Another significant patent by VanHanehem is for a polishing composition specifically for semiconductor wafers. This aqueous composition features a nonionic surfactant that effectively suppresses the removal rate of silicon carbide-nitride. The surfactant has both hydrophilic and hydrophobic groups, with the hydrophobic group having a carbon chain length greater than three. This formulation demonstrates a remarkable ability to maintain a controlled removal rate, which is crucial for semiconductor manufacturing.
Career Highlights
Throughout his career, Matthew R VanHanehem has worked with several prominent companies in the semiconductor industry. Notable among these are Rohm and Haas, Electronic Materials CMP Holdings, Inc., and Rodel Holdings, Inc. His experience in these organizations has contributed to his development of innovative solutions in semiconductor processing.
Collaborations
VanHanehem has collaborated with esteemed colleagues such as John Francis Quanci and Jinru Bian. These partnerships have likely fostered a creative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Matthew R VanHanehem's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative polishing compositions are paving the way for advancements in semiconductor manufacturing processes.