The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Jan. 04, 2001
Applicant:
Inventors:
Vilas N. Koinkar, Wilmington, DE (US);
Reza Golzarian, Santa Clara, CA (US);
Matthew VanHanehem, Bear, DE (US);
Qiuliang Luo, Newport Beach, CA (US);
James Shen, Portland, OR (US);
Peter A. Burke, Avondale, PA (US);
Assignee:
Rodel Holdings, Inc., Wilmington, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 4/900 ;
U.S. Cl.
CPC ...
B24B 4/900 ;
Abstract
The present invention relates to methods for break-in and conditioning polishing pads containing a fixed abrasive matrix. The polishing pads are useful for chemical-mechanical polishing (CMP). The present invention also relates to a method of determining the wear rate of a fixed abrasive polishing pad.
Koinkar, Vilas. (2002). Methods for break-in and conditioning a fixed abrasive polishing pad (U.S. Patent No. 6419553). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6419553
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile