Masatoshi Wakahara

Title: Masatoshi Wakahara: Innovator in Wafer Processing Technology

Introduction

Masatoshi Wakahara is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of wafer processing, holding a total of 5 patents. His innovative methods have advanced the technology used in semiconductor manufacturing.

Latest Patents

Wakahara's latest patents include a wafer processing method that involves several intricate steps. The first step is forming a mask on the back side of a wafer that includes a device layer. This mask is used to create grooves in the substrate along streets from the back side of the wafer. Following this, plasma etching is applied from the back side through the mask to form grooves in the substrate, defining chip regions surrounded by these grooves. After the etching step, the wafer is immersed in water with ultrasonic vibrations, which causes the device layer to crack or rupture along the outer peripheral edges of the chip regions. Finally, a tape is bonded to the front side of the wafer before the water immersion step. Another patent describes a similar wafer processing method, which includes forming a mask on the back side of the wafer and performing plasma etching to create etched grooves along each street.

Career Highlights

Throughout his career, Masatoshi Wakahara has worked with notable companies, including Disco Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in wafer processing technology.

Collaborations

Wakahara has collaborated with talented individuals such as Kentaro Odanaka and Wakana Onoe. These partnerships have fostered innovation and creativity in his work.

Conclusion

Masatoshi Wakahara's contributions to wafer processing technology have made a significant impact in the field. His innovative methods and collaborations continue to influence the semiconductor industry.