Masanobu Zenke

Title: Innovator Profile: Masanobu Zenke

Introduction

Masanobu Zenke is a distinguished inventor based in Tokyo, Japan, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 21 patents, he has played a pivotal role in enhancing the reliability and efficiency of semiconductor devices.

Latest Patents

Among his latest innovations is a patent pertaining to a semiconductor device and a method for manufacturing the same. This invention features a metal wiring conductor designed to connect with a contact hole through an interlayer insulator layer on a lower level circuit. The method involves depositing a lower level tungsten film under conditions that ensure excellent step coverage, particularly in filling the contact hole. An upper level tungsten film is then deposited under conditions that result in a film with lower stress than that of the lower level tungsten film. This design allows the metal wiring conductor to comprise a double layer, effectively reducing the overall stress across the film, and thus enhancing reliability by avoiding voids in the tungsten film wiring conductor. This advancement also simplifies the manufacturing process by reducing the number of steps involved.

Another notable invention by Zenke is a method for manufacturing a semiconductor device that includes a capacitor portion with a lower electrode, a dielectric film, and an upper electrode situated on a semiconductor substrate. In this method, a silicon film is deposited on both the lower electrode and the adjacent insulating film. Following this, annealing is conducted in a nitrogen or ammonia atmosphere to nitride the silicon film, which is further processed to form a silicon nitride film via Low-Pressure Chemical Vapor Deposition (LP-CVD).

Career Highlights

Masanobu Zenke's career includes significant tenure at companies such as NEC Corporation and NEC Electronics Corporation. His work at these organizations has been integral to his innovative pursuits, allowing him to refine his techniques and contribute to key advancements in semiconductor technology.

Collaborations

Throughout his career, Zenke has collaborated with notable colleagues, including Toshiyuki Hirota and Hirohito Watanabe. These partnerships have facilitated the exchange of ideas and expertise, contributing to the successful development of multiple patents in his field.

Conclusion

Masanobu Zenke is a prominent figure in the realm of semiconductor innovation. With a strong patent portfolio and a career marked by significant contributions and collaborations, he continues to influence the landscape of semiconductor technology. His work not only enhances device reliability but also streamlines manufacturing processes, marking him as an inventor of considerable importance in the industry.