The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2000
Filed:
Feb. 09, 1998
Applicant:
Inventor:
Masanobu Zenke, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438398 ;
Abstract
A stacked storage capacitor of a dynamic random access memory cell has an accumulating electrode increased in surface area by growing hemispherical silicon grains on an amorphous silicon strip, and a barrier layer of titanium nitride is previously formed between a source region of an associated field effect transistor and the amorphous silicon strip so that phosphorus is hardly diffused from the amorphous silicon strip into the source region.