Masanobu Matsunaga

Title: Masanobu Matsunaga: Innovator in Vertical Heat Treatment Technology

Introduction

Masanobu Matsunaga is an inventor based in Nirasaki, Japan. He has made significant contributions to the field of heat treatment technology, focusing on innovative apparatuses designed to enhance the efficiency of film formation processes. Although he currently holds no granted patents, his work is noteworthy for its potential impact on the industry.

Latest Patent Applications

Masanobu Matsunaga's latest patent applications include two significant inventions. The first is a "VERTICAL HEAT TREATMENT APPARATUS AND METHOD OF OPERATING VERTICAL HEAT TREATMENT APPARATUS." This apparatus features a gas supply part that introduces a film-forming gas into a reaction chamber. It also includes gas distribution adjusting members positioned strategically above and below the target substrates. These members consist of a first plate-shaped member with convex and concave portions and a second plate-shaped member with similar features, designed to optimize gas distribution during the treatment process.

The second application is for a "Film Forming Apparatus Using Gas Nozzles." This apparatus incorporates first and second source gas nozzles that extend in the arrangement direction of the substrates. Each nozzle is equipped with multiple gas ejection holes that direct the source gas toward the central regions of the substrates. Additionally, it includes a reaction gas supply unit, source gas supply lines, and tanks for accumulating the source gas under pressure, along with valves and an exhaust port for efficient operation.

Conclusion

Masanobu Matsunaga's innovative approaches to vertical heat treatment technology demonstrate his commitment to advancing the field. His latest patent applications reflect a deep understanding of the complexities involved in film formation processes. As he continues to develop his ideas, he may contribute significantly to future advancements in this area.