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For the Inventor, By the Inventor

Nirasaki, Japan

Masaki Kondo

USPTO Granted Patents = 11 

Average Co-Inventor Count = 1.7

ph-index = 6

Forward Citations = 261(Granted Patents)


Location History:

  • Yamanashi, JP (1995)
  • Kofu, JP (1996)
  • Nirasaki, JP (1993 - 2013)
  • Miyagi, JP (2017 - 2018)

Company Filing History:

goldMedal11 out of 10,346 
 
Tokyo Electron Limited
 patents

Years Active: 1993-2018

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11 patents (USPTO):Explore Patents
1. 9905485 - Method of monitoring output intensity of laser beam in bevel etching apparatus (2018-02-27),
2. 9623516 - Etching method and bevel etching apparatus (2017-04-18),
3. 9618493 - Substrate processing apparatus and method for detecting an abnormality of an ozone gas concentration (2017-04-11),
4. 8506718 - Polymer removing apparatus and method (2013-08-13),
5. 8454752 - Foreign substance removing apparatus, foreign substance removing method, and storage medium (2013-06-04),
6. 7993458 - Vacuum processing apparatus and method (2011-08-09),
7. D552138 - Arm transferring substrate to be processed (2007-10-02),
8. 6522942 - Transfer apparatus for semiconductor process (2003-02-18),
9. 5557215 - Self-bias measuring method, apparatus thereof and electrostatic chucking (1996-09-17),
10. 5460684 - Stage having electrostatic chuck and plasma processing apparatus using (1995-10-24),
11. 5179498 - Electrostatic chuck device (1993-01-12),
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