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Nirasaki, Japan

Masaki Kondo

USPTO Granted Patents = 11 (Patent Applications = 1)

Average Co-Inventor Count = 1.7

ph-index = 6

Forward Citations = 261(Granted Patents)

Location History:

Yamanashi, JP (1995)
Kofu, JP (1996)
Nirasaki, JP (1993 - 2013)
Miyagi, JP (2017 - 2018)

Company Filing History:

11 out of 10,295

Tokyo Electron Limited

Years Active: 1993-2018

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11 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 9905485 - Method of monitoring output intensity of laser beam in bevel etching apparatus (2018-02-27),

2. 9623516 - Etching method and bevel etching apparatus (2017-04-18),

3. 9618493 - Substrate processing apparatus and method for detecting an abnormality of an ozone gas concentration (2017-04-11),

4. 8506718 - Polymer removing apparatus and method (2013-08-13),

5. 8454752 - Foreign substance removing apparatus, foreign substance removing method, and storage medium (2013-06-04),

6. 7993458 - Vacuum processing apparatus and method (2011-08-09),

7. D552138 - Arm transferring substrate to be processed (2007-10-02),

8. 6522942 - Transfer apparatus for semiconductor process (2003-02-18),

9. 5557215 - Self-bias measuring method, apparatus thereof and electrostatic chucking (1996-09-17),

10. 5460684 - Stage having electrostatic chuck and plasma processing apparatus using (1995-10-24),

11. 5179498 - Electrostatic chuck device (1993-01-12),

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