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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9905485 B1

PDFFull Text
Date of Patent:
Feb. 27, 2018

Filed:

Dec. 02, 2015

Method of monitoring output intensity of laser beam in bevel etching apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Masaki Kondo, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

IPUSA, PLLC

Primary Examiner:

Binh X Tran

Int. Cl.
CPC ...
G01R 31/00 (2006.01); H01L 21/66 (2006.01); B23K 26/362 (2014.01); B23K 26/03 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/67 (2006.01); B23K 26/361 (2014.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01); B23K 26/032 (2013.01); B23K 26/361 (2015.10); B23K 26/362 (2013.01); H01L 21/0209 (2013.01); H01L 21/31138 (2013.01); H01L 21/6708 (2013.01); H01L 21/67115 (2013.01); H01L 21/67253 (2013.01); H01L 22/12 (2013.01);
Abstract

Disclosed is an etching processing method using a bevel etching apparatus for etching a substrate by irradiating a laser beam, the bevel etching apparatus including a laser generator and an image capturing unit. The method includes a process, by the image capturing unit, of capturing an image of an inner part of a processing container by illuminating the inner part of the processing container by scattered light of the laser beam emitted from the laser generator; a process of calculating brightness of an image of a predetermined area out of the captured image of the inner part of the processing container; and a process of monitoring, based on data indicating a correlation between an output value of the laser beam output from the laser generator and the brightness, the output value of the laser beam with respect to the calculated brightness.

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Kondo, Masaki. (2018). Method of monitoring output intensity of laser beam in bevel etching apparatus (U.S. Patent No. 9905485). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9905485

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