Miyagi, Japan

Masafumi Urakawa

USPTO Granted Patents = 13 

Average Co-Inventor Count = 1.8

ph-index = 5

Forward Citations = 639(Granted Patents)


Location History:

  • Nirasaki, JP (2011)
  • Salem, MA (US) (2010 - 2012)
  • Miyagi, JP (2015 - 2021)

Company Filing History:


Years Active: 2010-2025

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13 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Masafumi Urakawa

Introduction: Masafumi Urakawa is a renowned inventor based in Miyagi, Japan, who has made significant contributions to the field of plasma processing technology. With a total of 13 patents to his name, Urakawa is recognized for his innovative approaches to enhancing plasma processing apparatuses and methodologies.

Latest Patents: Urakawa's recent advancements include a "Recipe Updating Method," where he has developed a systematic approach for improving the efficiency of plasma processing on substrates. This method involves analyzing temperature changes during processing and optimizing recipe timings to ensure optimal performance. Another noteworthy patent under his name is related to a "Member and Plasma Processing Apparatus," which features a specially coated member used in plasma processing vessels. This coating includes cobalt and is designed to enhance the durability and effectiveness of the plasma generation process.

Career Highlights: Urakawa currently works at Tokyo Electron Limited, a leading company in semiconductor and electronics manufacturing. His tenure at Tokyo Electron has allowed him to apply his innovative ideas in practical settings, driving significant advancements in the technology used for plasma processing.

Collaborations: Throughout his career, Urakawa has collaborated with esteemed colleagues, including Masahiro Ogasawara and Koichi Nagami. These partnerships have fostered a collaborative environment where innovative ideas can flourish, contributing to the successful development of new technologies in their field.

Conclusion: Masafumi Urakawa’s contributions to the field of plasma processing technology demonstrate the impact of innovative thinking and collaboration. With his latest patents and continued work at Tokyo Electron Limited, Urakawa's influence on the industry is poised to grow even further, inspiring future advancements in technology.

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