Nirasaki, Japan

Makoto Wada


Average Co-Inventor Count = 4.7

ph-index = 1

Forward Citations = 1(Granted Patents)


Location History:

  • Nirasaki, JP (2022 - 2024)
  • Yamanashi, JP (2024)

Company Filing History:


Years Active: 2022-2025

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5 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Makoto Wada

Introduction: Makoto Wada is a prominent inventor based in Nirasaki, Japan, known for his significant contributions to film forming techniques. With a total of five patents to his name, Wada's work is at the forefront of advanced materials development, particularly in the realm of film formation processes.

Latest Patents: Wada's most recent patents focus on efficient methods for forming films on substrates. One of his notable patents describes a film forming method that includes a loading process for a substrate into a processing container. This innovative technique involves a two-step process: the first step forms an interface layer on the substrate using a plasma of a first mixed gas containing carbon, while the second step creates a graphene film on this interface layer using a plasma of a second mixed gas. Another significant patent entails a film forming apparatus that continuously produces films on one or multiple substrates. This method incorporates an efficient cleaning process of the apparatus and includes post-processing steps that utilize oxygen- and hydrogen-containing gases to enhance the film quality.

Career Highlights: Makoto Wada is currently associated with Tokyo Electron Limited, a leading company in the field of semiconductor manufacturing and technology. His career at this organization demonstrates his commitment to pushing the boundaries of film formation technology and delivering innovative solutions for the industry.

Collaborations: Throughout his career, Wada has collaborated with talented professionals such as Takashi Matsumoto and Ryota Ifuku. These collaborations have fostered innovative ideas and methodologies, significantly contributing to advancements in their respective fields.

Conclusion: Makoto Wada's inventive spirit and dedication to enhancing film forming technologies make him a notable figure in the world of inventions. His contributions not only advance technological capabilities but also showcase the importance of collaboration in fostering innovation within the industry. As Wada continues to develop groundbreaking methods and apparatuses, his work will likely influence the future of material science and semiconductor technologies.

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