The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Nov. 02, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Makoto Wada, Nirasaki, JP;
Nobutake Kabuki, Nirasaki, JP;
Ryota Ifuku, Nirasaki, JP;
Takashi Matsumoto, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C01B 32/186 (2017.01); C23C 16/02 (2006.01); C23C 16/26 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02381 (2013.01); C01B 32/186 (2017.08); C23C 16/02 (2013.01); C23C 16/26 (2013.01); C23C 16/4583 (2013.01); C23C 16/50 (2013.01); H01J 37/32715 (2013.01); H01L 21/02068 (2013.01); H01L 21/0245 (2013.01); H01L 21/02488 (2013.01); H01L 21/02502 (2013.01); H01L 21/02513 (2013.01); H01L 21/02527 (2013.01); H01L 21/0262 (2013.01); H01L 21/02658 (2013.01); H01L 21/7685 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/334 (2013.01);
Abstract
A substrate processing method of processing a substrate having a base film includes a loading process of loading the substrate into a processing container, a first process of performing a first plasma process in a state where the loaded substrate is held at a first position by raising substrate support pins of a stage arranged in the processing container, and a second process of performing a second plasma process while holding the substrate at a second position by lowering the substrate support pins.